Tube with Bonded Cathode and Electrode Structure and Getter.

Abstract

The variety of technologies that have been applied in the development of a bonded grid cathode are described. These include chemical vapor deposition of tungsten, molybdenum, iridium BN, and Si3N4 on both sides of a sintered tungsten cathode disk. Zirconium and titanium getters have been used to eliminate nitrogen evolution problems. The getter plates are also used as heat shields for the bonded heater. Films of Si3N4 have been added to the insulation to prevent calcium and barium diffusion into the layer and maintain adequate resistivity and breakdown strength. Plasma etching was introduced as a method of removing Si3N4 from the cathode pores.

Document Details

Document Type
Technical Report
Publication Date
May 09, 1979
Accession Number
ADD006284

Entities

People

  • David W. Oliver
  • Norman T. Lavoo

Organizations

  • United States Army

Tags

DTIC Thesaurus Topics

  • Chemical Vapor Deposition
  • Diffusion
  • Electrodes
  • Elements
  • Heat Shields
  • Insulation
  • Metals
  • Molybdenum
  • Nitrogen
  • Personal Information Managers
  • Refractory Metals
  • Titanium
  • Transition Metals
  • Tungsten
  • Vapor Deposition
  • Zirconium

Fields of Study

  • Materials science

Readers

  • Electrical Engineering
  • Electrochemical Engineering/ Fuel Cell Technologies
  • Systems Analysis and Design

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene