Nondestructive Analysis of Multilayer Roughness Correlation.
Abstract
This invention pertains to non-destructive measurement techniques of microroughness cross-correlation properties between boundary layers in multilayered dielectrics. In particular, this invention pertains to a method for evaluating the overall cross-correlation nature of multilayered dielectric stacks based on comparisons between the measured angular distribution of scattered light and the calculated distributions of scattered light for various dielectric stack models. The various models are based on different cross-correlation properties. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 26, 1979
- Accession Number
- ADD006994
Entities
People
- John M. Elson
Organizations
- United States Department of the Navy