Localized Anodic Thinning.

Abstract

A protective mask and a method of localized anodic thinning to prevent excessive thinning of an epitaxial layer in the forming of a field effect transistor. A moat exposing the epitaxial layer is provided in the protective mask surrounding a device pattern or group of patterns to be formed in the epitaxial layer by anodic thinning. During the thinning process, the area of the epitaxial layer exposed by the moat becomes fully depleted and cuts off current into the region surrounded by the moat and prevents excessive thinning of the epitaxial layer under the design pattern. (Author)

Document Details

Document Type
Technical Report
Publication Date
Apr 22, 1980
Accession Number
ADD007231

Entities

People

  • Don Wayne Shaw

Organizations

  • United States Department of the Navy

Tags

Communities of Interest

  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Active Electronic Components
  • Electronic Components
  • Electronic Equipment
  • Electronics
  • Field Effect Transistors
  • Masks
  • Protective Masks
  • Semiconductor Devices
  • Solid State Electronics
  • Transistors

Readers

  • Nanofabrication and Microfabrication.
  • Semiconductor Device Technology