Method of Delineating a Desired Integrated Circuit Pattern Upon a Circuit Substrate.
Abstract
The general object of this invention is to provide a method of delineating a desired integrated circuit pattern upon a circuit substrate. A more specific object of the invention is to provide such a method in which the resist sensitivity is improved without a sacrifice in resolution.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 22, 1980
- Accession Number
- ADD007586
Entities
People
- Charles U. Pittman Jr.
- John N. Helbert
Organizations
- United States Army