A Nozzle Beam Source for Vapor Deposition.

Abstract

This application discloses a nozzle beam source for use in the vapor deposition of electrode materials such as gold, during the fabrication of precision quartz-crystal resonators, or the like. The nozzle beam source includes a graphite crucible and source tube, a tungsten wick within the source tube, and graphite-to-graphite mechanical seals.

Document Details

Document Type
Technical Report
Publication Date
Dec 15, 1980
Accession Number
ADD008501

Entities

People

  • Erich Hafner
  • Robert J . Ney

Organizations

  • United States Army

Tags

DTIC Thesaurus Topics

  • Crucibles
  • Electrodes
  • Fabrication
  • Graphitic Materials
  • Material Forming Processes
  • Materials
  • Materials Processing
  • Precision
  • Resonators
  • Tungsten
  • Vapor Deposition

Fields of Study

  • Physics

Readers

  • Optical Physics and Photonics.
  • Thermal Physics or Thermal Science.
  • Thin Film Deposition Science.