Quartz Resonator Processing System.
Abstract
Disclosed is a single chamber ultra-high vacuum processing system for the production of hermetically sealed quartz resonators wherein electrode metallization and sealing are carried out along with cleaning and bake-out without any air exposure between the processing steps. The system includes a common vacuum chamber in which is located a rotatable wheel-like member which is adapted to move a plurality of individual component sets of a flat pack resonator unit past discretely located processing stations in said chamber whereupon electrode deposition takes place followed by the placement of ceramic covers over a flame containing a resonator element and then to a sealing stage where a pair of hydraulic rams including heating elements effect a metallized bonding of the covers to the flame. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 01, 1980
- Accession Number
- ADD008508
Entities
People
- Roswell D. M. Peters
Organizations
- United States Army