Method of Chemically Polishing Both Sides of an SC-Cut Quartz Crystal Plate.
Abstract
Both sides of an SC-cut quartz crystal plate whose theta angle is between about -33 degrees and -36 degrees and whose phi angles is between about 20 degrees and 26 degrees are chemically polished by lapping the quartz plate with an abrasive and etching the lapped quartz plate in a 25 to 30 percent solution of hydrofluoric acid (HF) in water, the etching being carried out until surface roughnesses of between 0.05 micrometers and 0.04 micrometers are obtained.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 25, 1982
- Accession Number
- ADD009312
Entities
People
- John R. Vig
- Ronald J. Brandmayr
Organizations
- United States Army