A Nozzle Beam Source for Vapor Deposition.
Abstract
A nozzle beam source for use in the vapor deposition of electrode materials such as gold, during the fabrication of precision quartz-crystal resonators, or the like is described. The nozzle beam source includes a graphite crucible and source tube, a tungsten wick within the source tube, and graphite-to-graphite mechanical seals.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 11, 1982
- Accession Number
- ADD009816
Entities
People
- Erich Hafner
- Robert J . Ney
Organizations
- United States Army