Method of Making Miniature High Frequency SC-Cut Quartz Crystal Resonators.
Abstract
Miniature high frequency SC-cut quartz crystal resonators are made form a plano-plano SC-cut quartz crystal wafer by chemically polishing the wafer; then chemomechanically polishing the chemically polished wafer; then chemically polishing the chemomechanically polished wafer; depositing a suitable pattern of etch resist on the wafer using standard photolithographic techniques; chemically polishing the wafer; stripping the photoresist from the wafer; placing a suitable evaporative mask pattern into intimate contact with the wafer; depositing a suitable pattern of electrodes on the wafer; testing the resonators so formed on the wafer; selectively separating those resonators having the desired properties; mounting the selected resonators into an enclosure; adjusting the frequency of the selected resonators to the exact frequency desired; and hermetically sealing the enclosure.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 08, 1983
- Accession Number
- ADD010712
Entities
People
- A. Ballato
- J. R. Vig
Organizations
- United States Army