Chemical Vapor Deposition and Reactive Diffusion of Boron on Beryllium.

Abstract

This abstract discloses a method for depositing boron on a beryllium substrate by using chemical vapor deposition. The method involves treating the surface of a heated beryllium substrate with a mixture of argon and diborane. The substrate is rotated during the chemical vapor deposition for the formation of beryllium boride layer of uniform thickness. The CVD gas mixture is adjusted for improved bonding of the beryllium boride to the substrate and thus improved wear resistance and reduced friction characteristics of the beryllium substrate.

Document Details

Document Type
Technical Report
Publication Date
Dec 27, 1983
Accession Number
ADD011043

Entities

People

  • Debabrata Das
  • K. Kumar

Organizations

  • United States Department of the Navy

Tags

Readers

  • Electrical Engineering
  • Thin Film Deposition Science.