Mask Aligner for Solar Cell Fabrication.
Abstract
A novel method and device for accurately aligning a substrate comprising a silicon wafer in the fabrication of a silicon vertical junction solar cell are described which comprise a base plate having a recess therein defining an opening for snugly receiving the wafer, the recess including a substantially straight portion for mating with a cleaved edge of known crystallographic orientation provided on the wafer, and a mask plate for covering the base plate and wafer, the mask including a pattern in predetermined configuration through which the wafer may be exposed in the fabrication process for the solar cell. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- May 16, 1984
- Accession Number
- ADD011450
Entities
People
- D. K. Hufford
Organizations
- United States Department of the Air Force