Heat Pipe and Method of making same.
Abstract
The present invention relates generally to semiconductor crystal growth, and, in particular, relates to a device used in an apparatus for crystal growth. The instant invention sets forth a heat pipe for crystal growth that is able to operate at high pressure/temperature. A cylindrical heat pipe for use in a crystal growth furnace has walls of tungsten with a layer of titanium deposited thereover to prevent oxidation. Strengthening members are placed between the walls to provide added strength. A wick structure of tungsten is used in the annular chamber to carry a working fluid of lithium.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 06, 1985
- Accession Number
- ADD011654
Entities
People
- Ahern
Organizations
- United States Department of the Air Force