Method of Reducing Impurity and Antisite Defects in Semiconductor Crystal Materials, and Device and Apparatus Respectively Produced from and Utilizing Same.
Abstract
The surface of a semiconductor crystalline material is exposed to coherent photon radiation at frequencies chosen to resonate both cation and anion dimers of the doping materials during the growth process. The reduction of cations and anions improved crystal purity and results in a reduction of antisite defects.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 22, 1985
- Accession Number
- ADD011698
Entities
People
- M. N. Yoder
Organizations
- United States Department of the Navy