Surface Acoustic Wave Device for Sensing the Presence of Chemical Agents.

Abstract

A surface acoustic wave device is provided for sensing the presence of chemical agents by cheo-electronic means. The device includes a quartz substrate and means deposited on the substrate for propagating and receiving surface acoustic waves along the surface of the substrate. Regions are provided on the substrate containing etched tunnels, the walls of the etched tunnel being coated within with a chemical substance sensitive to the chemical agent to be detected. When surface acoustic waves are caused to pass over these regions, the reaction of the chemical agent to be detected with the chemical substance causes a change in the acoustic wave velocity. (Author)

Document Details

Document Type
Technical Report
Publication Date
Aug 07, 1985
Accession Number
ADD011865

Entities

People

  • A. Ballato

Organizations

  • United States Army

Tags

DTIC Thesaurus Topics

  • Acoustic Waves
  • Chemical Warfare Agents
  • Substrates
  • Surface Acoustic Wave Devices
  • Surface Acoustic Waves
  • Waves

Fields of Study

  • Physics

Readers

  • Environmental Engineering.
  • Optical Fiber Sensing and Electromagnetic Propagation.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems