Self Aligned Notch for InP Planar Transferred Electron Oscillator.

Abstract

A method of fabricating a notched indium phosphide planar transferred electron oscillator device which automatically aligns the high-resistivity notch position immediately adjacent to the cathode contact by slant evaporation of a metal coating over the edge of a masking layer followed by ion implantation. (Patent Applications)

Document Details

Document Type
Technical Report
Publication Date
Jan 13, 1986
Accession Number
ADD012185

Entities

People

  • Steven C. Binari

Organizations

  • United States Department of the Navy

Tags

DTIC Thesaurus Topics

  • Charged Particles
  • Coatings
  • Electrons
  • Evaporation
  • Implantation
  • Ion Implantation
  • Ions
  • Metal Coatings
  • Oscillators
  • Patent Applications
  • Patents

Readers

  • Computer Vision.
  • Microwave Engineering.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene