Method of Fabricating High Efficiency Binary Planar Optical Elements.
Abstract
The high diffraction efficiency regime of binary gratings occurs at periodicities on the order of a wavelength in order to produce grating which diffract radiation with efficiencies of greater than 90%, a fabrication procedure is disclosed which uses holographic and very large scale integration techniques which allow fine control over the periodicity and depth parameters to produce binary planar optical elements having a ratio of lambda/T greater than one (where lambda equals the wavelength of an illuminating wavefront, and T equals the grating periodicit). Additionally, the disclosed process produces high optical quality diffractive elements with phase precision of as high as lambda/100. These diffractive elements include laser beam multiplexers, beam profile shapers, and binary lenses which are lossless optical transfer functions. (Patent applications)
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 16, 1986
- Accession Number
- ADD012374
Entities
People
- Wilfrid Veldkamp
Organizations
- United States Department of the Air Force