Method of Chemically Polishing Fuzed Quartz.
Abstract
The general object of this invention is to provide a method of chemically polishing fused quartz. A more specific object of the invention is to provide such a method that enables one to remove surface damage such as microcracks from the surface of the fused quartz so that a good surface finish is obtained for device fabrication. Fused quartz is chemically polished by lapping the fused quartz, treating the lapped fused quartz with an etchant at high pressure in a high pressure vessel while agitating to circulate the etchant and maintaining a uniform temperature throughout the etchant, cooling the vessel, removing the fused quartz, rinsing thoroughly with water and spinning dry.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 20, 1986
- Accession Number
- ADD012606
Entities
People
- Ronald J. Brandmayr
Organizations
- United States Army