Method of Forming Silicon Carbide Films on Tantalum Containing Substrates.

Abstract

A process for forming a smooth, continuous coating of silicon carbide upon tantalum carbide is disclosed, as are several useful manufacturers produced with the process. A tantalum carbide substrate may be formed directly upon metallic tantalum articles by disclosed means. The material formed with this process has been used to fabricate semiconducting devices including light emitting diodes and selective thermal radiators which can be operated at 1200 degrees C. The method is further useful for producing tantalum metal incandescent light filaments and corrosion resistant tantalum articles.

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Document Details

Document Type
Technical Report
Publication Date
May 17, 1988
Accession Number
ADD013791

Entities

People

  • Arrigo Addamiano
  • Philipp H. Klein

Organizations

  • United States Department of the Navy

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Acids
  • Carbides
  • Ceramic Materials
  • Coatings
  • Compound Semiconductors
  • Heating
  • High Temperature
  • Light Emitting Diodes
  • Materials
  • Patents
  • Semiconductor Devices
  • Silicon Carbide
  • Substrates
  • Tantalum
  • Tantalum Alloys
  • Tantalum Carbides
  • United States

Readers

  • Electrical Engineering
  • Thin Film Deposition Science.