Thermal Test Chamber Device.

Abstract

A thermal test chamber device is provided that includes two half housing sections that are secured together to define a chamber there between with a window for viewing inside the chamber and with inlet and outlet means for supplying and exhausting a medium to and from the chamber. The lower half housing section has electrical circuit means mounted relative thereto for testing a semiconductor chip specimen when presented relative thereto. Keywords: Patent applications, Thermal cycling. (aw)

Document Details

Document Type
Technical Report
Publication Date
Oct 27, 1988
Accession Number
ADD013924

Entities

People

  • Bernard E. Martin
  • Daron C. Holderfield
  • Samuel S. Russell

Organizations

  • United States Army

Tags

DTIC Thesaurus Topics

  • Carbides
  • Chemical Compounds
  • Circuits
  • Compound Semiconductors
  • Electrical Circuits
  • Electronics
  • Inorganic Carbon Compounds
  • Inorganic Chemicals
  • Patent Applications
  • Patents
  • Semiconductors
  • Silicon Carbide
  • Solid State Electronics

Readers

  • Electrical Engineering
  • Reinforced Composite Materials

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems