Method of Making a Millimeter Wave Monolithic Integrated Circuit.
Abstract
The general object of this invention is to provide a method of making a millimeter monolithic integrated circuit. A more specific object of the invention is to provide such a method that allows for device isolation during epitaxial growth and integral heat sink for low thermal resistance. A still further object of the invention is to provide such a method that will result in circuits that can be used as oscillators and amplifiers in the microwave and millimeter wave frequency region. Patent applications. (RH)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 23, 1989
- Accession Number
- ADD013952
Entities
People
- Arthur Paolella
Organizations
- United States Army