Method of Making a Millimeter Wave Monolithic Integrated Circuit.

Abstract

The general object of this invention is to provide a method of making a millimeter monolithic integrated circuit. A more specific object of the invention is to provide such a method that allows for device isolation during epitaxial growth and integral heat sink for low thermal resistance. A still further object of the invention is to provide such a method that will result in circuits that can be used as oscillators and amplifiers in the microwave and millimeter wave frequency region. Patent applications. (RH)

Document Details

Document Type
Technical Report
Publication Date
Jan 23, 1989
Accession Number
ADD013952

Entities

People

  • Arthur Paolella

Organizations

  • United States Army

Tags

DTIC Thesaurus Topics

  • Amplifiers
  • Circuits
  • Epitaxial Growth
  • Frequency
  • Heat Energy
  • Heat Sinks
  • Integrals
  • Integrated Circuits
  • Inventions
  • Microwaves
  • Millimeter Waves
  • Patent Applications
  • Patents
  • Resistance
  • Thermal Resistance

Readers

  • Electrical Engineering
  • Radar Systems Engineering.
  • Software Engineering

Technology Areas

  • 5G