Method of Modifying the Dielectric Properties of an Organic Polymer Film.
Abstract
This invention relates in general to a method of modifying the dielectric properties of an organic polymer film by ion implantation and in particular to such a method for modifying the dielectric properties of a film of a Poly-p-Xylylene formed by vapor deposition polymerization. Poly-p-Xylylenes, also known by their trade name of Parylene, are well known conformal coatings that are primarily used as insulators and isolators in electronics. These materials are interesting because of their ability to provide ultrathin films that conform to substrates of varied geometrical shapes and irregularities. Patent applications. (jes)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 12, 1989
- Accession Number
- ADD014171
Entities
People
- Michael Binder
- Robert J. Mammone
Organizations
- United States Army