Formation of High T(c) Superconducting Films by Organometallic Chemical Vapor Deposition.

Abstract

This invention relates to a method of forming high Tc superconducting films by organometallic chemical vapor deposition. More specifically, this invention relates to a method of forming superconducting films on a semiconductor surface by chemical vapor deposition of volatile organometallic compounds of the rare earth and alkaline earth elements, and copper. Keywords: Reports, Periodicals, Military publications, Scientific literature. (eg)

Document Details

Document Type
Technical Report
Publication Date
May 16, 1989
Accession Number
ADD014498

Entities

People

  • Alan Berry
  • D. Kurt Gaskill
  • Edward Cukauskas
  • Ronald Holm

Organizations

  • United States Department of the Navy

Tags

DTIC Thesaurus Topics

  • Chemical Compounds
  • Chemical Vapor Deposition
  • Compound Semiconductors
  • Electronics
  • Inventions
  • Literature
  • Military Publications
  • Organometallic Compounds
  • Periodicals
  • Scientific Literature
  • Semiconductors
  • Solid State Electronics
  • Vapor Deposition

Readers

  • Materials Science and Engineering.
  • Polymer Science and Technology
  • Superconducting Magnet Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene