Thermal Fixture for Testing an Integrated Circuit.
Abstract
Apparatus for controlling the temperature of an integrated circuit. A thermally conductive block has a vacuum passage connected to a vacuum pump for clamping the block to the top of an integrated circuit housing without mechanical clamping structures. A closed fluid loop including a circulating pump, heater and chiller modulate the temperature of a fluid passing through the conductive block thereby to control its temperature and the temperature of the integrated circuit independently of any other integrated circuit.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 10, 1992
- Accession Number
- ADD015380
Entities
People
- Walter T. Schneider
Organizations
- United States Army