BaF2/GaAs Electronic Components.
Abstract
Metal insulator semiconductor field effect transistors (MISFETs), charge coupled devices (CCDs), and capacitors based on an epitaxial barium fluoride (BF2) insulator layer deposited directly onto a single crystal gallium arsenide (GaAs) substrate
Document Details
- Document Type
- Technical Report
- Publication Date
- May 19, 1994
- Accession Number
- ADD016391
Entities
People
- Francisco Santiago
- Tak-kin Chu
Organizations
- United States Department of the Navy