Selective Vapor Deposition Using Films Cross-Reference to Related Application.

Abstract

The present invention is directed to the selective and non-selective vapor deposition of materials upon substrates. Vapor deposition is accomplished by providing a substrate having one or more chemical groups on its surface, the chemical groups being capable of bonding to a deposition catalyst, contacting a deposition catalyst to the chemical groups of the substrate and vapor depositing a material upon the catalyst via vapor deposition. The vapor deposition may also be selective vapor deposition. jg p.49

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Document Details

Document Type
Technical Report
Publication Date
Apr 04, 1995
Accession Number
ADD017650

Entities

People

  • David S. Hsu
  • Jeffrey M. Calvert
  • Pehr E. Pehrsson
  • Stephen J. Potochnik

Organizations

  • United States Department of the Navy

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Alkynes
  • Aluminum Oxides
  • Ceramic Materials
  • Chemical Synthesis
  • Chemical Vapor Deposition
  • Chemistry
  • Dielectrics
  • Materials
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Organic Chemistry
  • Sputtering
  • Substrates
  • Vapor Deposition

Fields of Study

  • Chemistry

Readers

  • Thin Film Deposition Science.