Lactic Acid Treatment of InP Materials.

Abstract

The use of lactic acid or its derivative in compositions to etch or polish materials containing indium phosphide results in treated surfaces that have reduced surface roughness compared to the surfaces treated with compositions devoid of lactic acid or its derivative. Indium phosphide surfaces treated with compositions containing lactic acid can have treated surfaces that are smooth or mirror-like, meaning that surface irregularities thereon are less than about 50 A.

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Document Details

Document Type
Technical Report
Publication Date
May 08, 1996
Accession Number
ADD018343

Entities

People

  • Galina Kelener
  • J. B. Boss
  • Kiki I. Anatasiou
  • Steve Binari

Organizations

  • United States Department of the Navy

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Acids
  • Aqueous Solutions
  • Chemical Compounds
  • Discontinuities
  • Finishes
  • Hydrochloric Acid
  • Inventions
  • Lactic Acid
  • Materials
  • Nitric Acid
  • Patent Applications
  • Patents
  • Phosphoric Acids
  • Polishes
  • Polishing
  • Roughness
  • Surface Roughness

Readers

  • Analytical Chemistry
  • Semiconductor Device Technology
  • Surface Coatings Technology.