Diamond or Diamond Like Carbon Coated Chemical Sensors and a Method of Making Same

Abstract

The present invention relates to improved acoustic and optical wave chemical sensor devices and to a method of forming the devices. In particular, the invention relates to coating the wave chemical sensors with a protective coating of diamond or a diamond like carbon (DLC) to improve device performance, durability and corrosion resistance when the device is in contact with a corrosive or a moist atmosphere or environment.

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Document Details

Document Type
Technical Report
Publication Date
Apr 30, 1997
Accession Number
ADD018640

Entities

People

  • Douglas B. Chrisey
  • Paul C. Dorsey
  • Robert A. Mcgill

Organizations

  • United States Department of the Navy

Tags

DTIC Thesaurus Topics

  • Acoustic Waves
  • Chemical Synthesis
  • Chemistry
  • Coatings
  • Deposition (Materials Processing)
  • Detectors
  • Frequency Shift
  • Light Sources
  • Material Degradation Processes
  • Materials
  • Materials Processing
  • Materials Science
  • Polymeric Films
  • Polymers
  • Silicon Compounds
  • Surface Acoustic Wave Devices
  • Surface Acoustic Waves

Fields of Study

  • Materials science

Readers

  • Electrical Engineering
  • Surface Coatings Technology.
  • Thin Film Deposition Science.