Specular Reflection Optical Bandgap Thermometry
Abstract
A new technique of optical bandgap thermometry allows one to accurately measure the temperature of semiconductor samples by using the temperature dependent reflective properties of the samples; The disclosed technique uses specular reflection at an oblique angle of incidence. Light from a light source such as quartz halogen lamp is chopped and focused by a lens. The light then is focused onto the sample at an oblique angle of incidence. The light is specularly reflected by the sample and is focused by a lens into a spectrometer: The spectrometer is used to determine the spectrum of the light reflected from the sample. The reflectance varies with temperature and the temperature of the sample is calculated as a function of the reflectance spectrum.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 17, 1998
- Accession Number
- ADD019008
Entities
People
- Ronald T. Holm
Organizations
- United States Department of the Navy