Quasi-Static Fiber Pressure Sensor.

Abstract

This invention is a quasi-static fiber pressure sensor using self-referenced interferometry based on a broadband semiconductor source which probes the pressure plate deflection within a Fabry-Perot cavity where phase is demodulated with a dual grating spectrometer providing real-time high resolution remote measurement of pressure using optical interrogation of a deflecting pressure plate. This technique yields absolute gap measurement in real time over a wide range of gap lengths with nanometer resolution. By tailoring the pressure plate design to cover the range of gaps and deflection that can be resolved. pressure sensing with psi resolution can be obtained in a kpsig pressure range.

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Document Details

Document Type
Technical Report
Publication Date
Sep 24, 1998
Accession Number
ADD019048

Entities

People

  • Dominique M. Dagenais

Organizations

  • United States Department of the Navy

Tags

Communities of Interest

  • Sensors

DTIC Thesaurus Topics

  • Air Gaps
  • Broadband
  • Charge Coupled Devices
  • Curve Fitting
  • Deflection
  • Detectors
  • Electronics
  • High Resolution
  • Interferometry
  • Inventions
  • Light Sources
  • Measurement
  • Optical Fibers
  • Optics
  • Patent Applications
  • Semiconductors
  • Spectrometers

Fields of Study

  • Physics

Readers

  • Fluid Dynamics.
  • Optical Physics and Photonics.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems