Pulser Laser Deposition of Transparent Conducting Thin Films on Flexible Substrates
Abstract
The invention relates to the deposition of transparent conducting thin films, such as transparent conducting oxides (TCO) such as tin doped indium oxide (ITO) and aluminum doped zinc oxide (AZO) on flexible substrates by pulsed laser deposition. The coated substrates are used to construct low cost, lightweight, flexible displays based on organic light emitting diodes (OLEDs).
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 19, 2001
- Accession Number
- ADD019767
Entities
People
- Heungsoo Kim
Organizations
- United States Department of the Navy