Self-Aligned Integrally Gated Nanofilament Field Emitter Cell and Array

Abstract

The present invention discloses a new field emitter cell and array consisting of groups of nanofilaments forming emitter cathodes. Control gates are microprocessed to be integrally formed with groups of nanofilament emitter cathodes on a substrate. Groups of nanofilaments are grown directly on the substrate material. As a result, the control gates and groups of nanofilaments are self-aligned with one another.

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Document Details

Document Type
Technical Report
Publication Date
Mar 09, 2001
Accession Number
ADD019929

Entities

People

  • David S. Hsu

Organizations

  • United States Department of the Navy

Tags

DTIC Thesaurus Topics

  • Carbon Nanotubes
  • Cell Structure
  • Chemical Vapor Deposition
  • Etching
  • Field Emission
  • Freeze Drying
  • Hydrocarbons
  • Hydrofluoric Acid
  • Inventions
  • Manufacturing
  • Materials
  • Materials Laboratories
  • Military Research
  • Patents
  • Standards
  • Substrates
  • United States

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