Effects of RIE Tuning on the Electrical and Temperature Characteristics of Quartz SAW Resonators,
Abstract
In recent years, Surface Acoustic Wave Resonators have been developed to the point of being useful in oscillator circuits used in the VHF and UHF ranges. The advantages of operating an oscillator at final frequency, as opposed to using a low frequency bulk crystal with multiplier circuits, are well known. If it is desired to cover an entire band with custom frequency sources, a multitude of masks (since each mask produces a single frequency resonator) or an effective tuning procedure is required. To minimize the number of masks required, the tuning procedure should have a wide tuning range with minimal effect on the other characteristics of the device. Reactive Ion Etching of the quartz meets these criteria. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1982
- Accession Number
- ADP001556
Entities
People
- Carl Kotecki
Organizations
- Motorola Mobility