Sputtered C-Axis Inclined Piezoelectric Films and Shear Wave Resonators,
Abstract
Sputtered piezoelectric films are being studied for potential application to VHF through microwave frequency acoustic wave devices. This paper reports on the growth and characterization of C-axis inclined ZnO and A1N films for shear wave resonators. Orientation relationships for shear wave excitation were calculated for these films which suggest a nearly pure shear wave could be excited with films having C-axis orientation approximately 45 deg. from the surface normal. At other angles, quasi-shear and quasi-longitudinal waves are excited. The well oriented ZnO or A1N films with C-axis inclined from the film normal were grown in a reactive dc planar magnetron sputtering system having an auxiliary anode structure. These films were evaluated by scanning electron microscopy (SEM) and BAW device measurements. The columnar structure of the C-axis crystallites, inclined from the Si substrate normal, was clearly visible in SEM. Films having C-axis inclination angles up to 45 deg. and thicknesses up to 10 microns have been obtained.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1983
- Accession Number
- ADP002466
Entities
People
- A. R. Landin
- J. S. Wang
- K. M. Lakin
Organizations
- Iowa State University