Improvements of Laser Interferometric Measurement System of Vibration Displacements,
Abstract
Improvements have been made on the laser interferometric measurement system of vibration displacements of quartz crystal resonators. In this paper, the following modifications have been made: the DC phase control and the small-deviation low-frequency phase modulation are introduced on a laser beam. The amplitude of the vibration displacement is obtained as a digital data. A measurement and processing of data are made by the computer system. The improved system can be used to the measurement of vibration displacement down to five angstroms within a few percent repeatibility in the frequency range from 1 MHz to 10 MHz. Using this system, the detailed vibration displacement distributions of a plano convex SC-cut quartz crystal resonators have been measured.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1983
- Accession Number
- ADP002475
Entities
People
- M. Okazaki
- T. Adachi
- Y. Tsuzuki
Organizations
- Yokohama National University