Force Sensor Using Double-Ended Tuning Fork Quartz Crystals,
Abstract
The purpose of this paper is to present designs and experimental test results of double-ended tuning fork quartz crystals vibrating in the fundamental and overtone flexure modes. These double-ended tuning fork quartz crystals were produced using photolithographic, chemical etching and laser frequency adjustment manufacturing techniques. The motions of the fundamental and overtone flexure modes of a double-ended tuning fork are described. Electode designs which depend on the crystal vibrational mode are used to optimize crystal parameters. The first order frequency-force coefficient of a double-ended tuning fork quartz crystal vibrating in the fundamental flexure mode is higher than that of the crystal vibrating in the higher order flexure modes. Experimental results show the ratio of these coefficients is approximately 2.3 and 3.2 respectively for the ratio of the coefficient of the fundamental mode to that of the first and second overtone modes respectively. These ratios are smaller than the frequency ratios between the overtone modes and the fundamental mode.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1983
- Accession Number
- ADP002483
Entities
People
- S. S. Chuang