Miniaturized LiTaO3 Strip Resonator,
Abstract
The piezoactive shear wave in LiTaO3 X-cut plate has a velocity of 4330 m/s for the fast mode and attractively high electro-mechanical coupling (47%). But the temperature characteristics of the X-cut plate resonator shows a 500 ppm change in the resonant frequency between - 10 deg. C and 60 deg. C. We developed a miniaturized strip plate type LiTaO3 resonator with stable temperature characteristics. In this paper, the displacement orientation of the thickness shear mode was studied in order to decide the crystal orientation of the longitudinal direction of the strip. Measurement of the Q factor with different rotation angles showed that displacement orientation of the fast mode was -48 deg. from the +Y axis. The width of the strip plate was chosen to separate the main mode from spurious modes. The experiment study shows that the optimum ratio of width to thickness is 1.5 to 2.0 or 2.8 to 3.0.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1983
- Accession Number
- ADP002498
Entities
People
- N. Wakatsuki
- S. Yamada
- Y. Fujiwara