High Energy Ion Deposited Carbon Films,
Abstract
The nature of the substrate preparation also appears to be important. This is illustrated in Figures 13 and 14 which show two topographies of diamond turned copper surfaces. In Figure 13, the nature and presence of grain boundaries is very evident following coating. It appears that some grains received no coating while others have a substantial coating. This was apparently due to delamination of certain grains following a cleaning of the coated surface. Figure 14 shows a similar diamond turned copper surface coated to the same thickness using a 4 keV carbon implant prior to deposition. This resulted in much better adhesion of the coating on the surface with improved uniformity of the various grains. Although the sharp edges of the diamond turning process appeared to be detremental with respect to coating adhesion, greater uniformity and adhesion can be obtained when higher energy implantation occurs first.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1982
- Accession Number
- ADP002589
Entities
People
- M. Stein
- S. Aisenberg