Some Aspects of the Growth and Characterization of 'Diamond Like' Carbon Films,

Abstract

This paper covers three topics: (1) the general properties and categorization of types of carbon films, (2) a discussion of some factors that must influence the growth of the so called diamond like films, (3) some results of characterization of diamond like films grown from low energy ion beams.

Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1982
Accession Number
ADP002591

Entities

People

  • J. C. Angus

Organizations

  • Case Western Reserve University

Tags

DTIC Thesaurus Topics

  • Beams (Radiation)
  • Charged Particles
  • Continents
  • Geographic Regions
  • Ion Beams
  • Ions
  • New Mexico
  • North America
  • Workshops

Readers

  • Materials Science and Engineering.
  • Theoretical Analysis.
  • Thin Film Deposition Science.