Thin Film Characterization Techniques Applicable to Diamond-Like Carbon Coatings,
Abstract
This brief survey covers some of the techniques for thin film evaluation and characterization. Many are very powerful techniques; however, systematic errors can occur in all and it is prudent to use two or more independent techniques whenever possible to determine important thin film parameters.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1982
- Accession Number
- ADP002596
Entities
People
- H. E. Bennett
Organizations
- Naval Air Weapons Station China Lake