Raman Scattering as a Probe of Thin-Films,
Abstract
Raman scattering provides a nondestructive probe of thin-film properties such as local structure, degree of crystallinity, microcrystal grain size and local strain fields. We have carried out a series of measurements on Si films with thicknesses as small as 20 A and with a transverse spatial resolution of about 0.5 micrometers. Applications to the characterization of diamond-like carbon films will be discussed.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1982
- Accession Number
- ADP002599
Entities
People
- S. R. J. Brueck
Organizations
- Massachusetts Institute of Technology