Microstructure-Property Relations in Sputtered Films,
Abstract
The mechanical and chemical properties of thin films depend at least in part on their microstructure. A structure zone model common to all vapor deposition methods has been developed to classify the various physical microstructures found.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1982
- Accession Number
- ADP002600
Entities
People
- R. Messier
Organizations
- Pennsylvania State University