Materials Modification by Ion Beam Mixing,

Abstract

This paper presents a general overview discussion of materials modification by ion beam mixing. This technique consists of depositing a thin film on a substrate and then using a beam of inert ions to mix up this area.

Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1984
Accession Number
ADP003948

Entities

People

  • J. Mayer

Organizations

  • Cornell University

Tags

DTIC Thesaurus Topics

  • Charged Particles
  • Films
  • Implantation
  • Ion Beams
  • Ion Implantation
  • Ions
  • Massachusetts
  • Materials
  • Substrates
  • Thin Films
  • Workshops

Readers

  • Academic Conference Management
  • Thin Film Deposition Science.