Review of the University of Manchester Ion Implantation Conference,

Abstract

This paper presents some highlights of a conference on ion implantation held at the University of Manchester. Some emphasis is put upon the use of ion implantation for materials other than semiconductors.

Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1984
Accession Number
ADP003950

Entities

People

  • P. Sagalyn

Organizations

  • United States Army Research Laboratory

Tags

DTIC Thesaurus Topics

  • Compound Semiconductors
  • Electronics
  • Implantation
  • Ion Implantation
  • Ions
  • Massachusetts
  • Materials
  • Semiconductors
  • Solid State Electronics
  • Universities
  • Workshops

Readers

  • Defense Technology Research and Development.
  • Radio communications and signal processing.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics