Sol-Gel Processing of Lithium Niobate Thin-Layers for Optical Applications,
Abstract
The sol-gel processing of lithium niobate thin-layers on silicon from heterometallic alkoxide solutions is described. Advantages of sol-gel processing for low-temperature formation of stoichiometric lithium niobate are discussed. A recyrstallization procedure, involving a bimetallic alkoxide, was developed for the purification of alkoxide solutions. The alkoxide complex contained the appropriate cation ratio for the preparation of stoichiometric lithium niobate. Solvent selection, addition of nitric acid or ammonium hydroxide, and thermal processing conditions were shown to affect the ceramic microstructures. In particular, the solvent system and additives influenced grain growth and porosity in the crystallized layers. Methoxyethanol-derived layers had a grain size approximately twice that observed for the ethanol system. Use of a rapid heating process produced dense layers at 650 degC, whereas oxygen treatments allowed for crystallization at 400 degC
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 01, 1992
- Accession Number
- ADP006448
Entities
People
- David A. Payne
- Dennis J. Eichorst
Organizations
- University of Illinois Urbana–Champaign