Preparation, Microstructure, and Ferroelectric Properties of Laser-Deposited Thin Batio sub3 and Lead Zirconate-Titanate Films,
Abstract
Ferroelectric thin films of BaTiO3 and lead zirconate titanate, PbZro.53Tio.4703 (PZT), have been prepared by pulsed excimer laser deposition. The microstructure and crystallography of these films have been studied by scanning electron microscopy (SEM), energy dispersive x-ray spectrometry (EDX), transmission electron microscopy (TEM), xray diffraction (XRD), and differential scanning calorimetry (DSC). Electrical properties, including remanent polarization, dielectric loss, and dielectric constant, have been measured. Also, switched remanent polarization has been measured under conditions of continuous cycling.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 05, 1991
- Accession Number
- ADP006645
Entities
People
- B. J. Rod
- K. W. Bennett
- L. P. Cook
- P. K. Schenck
- P. S. Brody
Organizations
- Harry Diamond Laboratories