Ferroelectric Thin Film Research in France,

Abstract

After a review of the research made on thin film deposition in France, this work presents the comparison between two chemical deposition methods for PZT films : sol-gel method based on low molecular weight precursors and solvent, and MOD Metallo-Organic Deposition) process based on a hydrophobic solvent. The influence of the viscosity of the solvent and of the solubility of water is shown with regard to stability and drying properties. The final electrical properties of the ferroelectric films are also compared such as the hysteresis loop which characterizes the most important properties for memory application : coercive voltage and rectangularity.

Document Details

Document Type
Technical Report
Publication Date
Apr 05, 1991
Accession Number
ADP006654

Entities

People

  • P. Barboux
  • P. Gaucher
  • S. P. Faure

Tags

Communities of Interest

  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Colorado
  • Electrical Properties
  • Films
  • Hydrophobic Properties
  • Hysteresis
  • Molecular Weight
  • Precursors
  • Solubility
  • Solvents
  • Thin Films
  • Viscosity

Readers

  • Materials Science and Engineering.
  • Petroleum Engineering
  • Thin Film Deposition Science.