Study of the Optical Properties of RF Sputtered Lithium Niobate Thin Films,
Abstract
Lithium niobate optical waveguides were fabricated on (110), and (100) sapphire by both diode and magnetron rf sputtering at 500-600 deg C in a flowing Ar/02 Atmosphere. Light coupling utilizing a rutile prism coupler was demonstrated. The propagation losses were obtained by measuring the scattered light from the surface using a fiber probe. The mode angles were also measured and used to calculate the thickness and the refractive indices of each sample. X-ray diffraction studies and the birefringence observed in the films have confirmed the crystalline nature the films. The lowest value of attenuation of the He-Ne laser light propagating in the lithium niobate waveguide sputtered on sapphire was determined to-be 1.1 +/- 0.1 dB/cm. In addition, the lowest attenuation in lithium niobate thin film waveguides sputtered on SiO2/Si substrates was measured to be 2.3 dB/cm using end-fire coupling and fiber probing techniques.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 05, 1991
- Accession Number
- ADP006660
Entities
People
- Charles Hung-jia Huang
- Thomas A. Rabson
Organizations
- Rice University