Characterization of PZT Films Fatigue at Low Frequency,

Abstract

We report a method using SEM, EDX, SIMS, and polarization-voltage hysteresis data to investigate changes that occur in PZT thin films fatigued using low (below 100 kHz) frequency square waves. Fatigue in PZT capacitors can limit the lifetime of destructive readout ferroelectric memories. Identification of physical and electronic changes that occur during fatigue will lead to understanding fatigue mechanisms and the development of improved. Electrode-Ferroelectric interfaces.

Document Details

Document Type
Technical Report
Publication Date
Apr 05, 1991
Accession Number
ADP006669

Entities

People

  • B. A. Morgan
  • M. S. Leung
  • R. A. Lipeles

Organizations

  • The Aerospace Corporation

Tags

DTIC Thesaurus Topics

  • Capacitors
  • Colorado
  • Doppler Effect
  • Electrodes
  • Films
  • Frequency
  • Frequency Shift
  • Hysteresis
  • Identification
  • Polarization
  • Square Waves
  • Thin Films
  • Waves

Readers

  • Electrical Engineering
  • Structural Health Monitoring of Composite Structures.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems