Ferroelectrics for Silicon VLSI,
Abstract
The application of ferroelectrics to EEPROM, non-volatile SRAMs, and sub-0.5 micron channel length MOS field effect transistors for silicon VLSI can significantly simplify device fabrication process, increase circuit density, and enhance device performance.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 05, 1991
- Accession Number
- ADP006678
Entities
People
- Israel H. Kalish
- Sheng T. Hsu
Organizations
- Sarnoff Corporation