High Performance Multilayer X-Ray Optics,
Abstract
We review the state-of-the-art in multilayer (ML) coatings for high normal incidence reflectivity at soft x-ray wavelengths. In particular, molybdenum-silicon ML and RU-boron carbide ML grown by magnetron sputtering have demonstrated normal incidence reflectivities as high as 64% at 130 A and 20% at 70 A respectively. A strong dependence of the Mo-Si layer morphology on the sputtering gas pressure is observed, and is directly correlated with the normal incidence x-ray reflectivity. We consider issues relevant to the deposition of multilayers on figured imaging optics, and describe recent measurements of the normal incidence reflectivity of spherical substrates coated with Mo-Si ML.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 22, 1992
- Accession Number
- ADP007068
Entities
People
- D. G. Stearns
- R. S. Rosen
- S. P. Vernon
Organizations
- Lawrence Livermore National Laboratory